Title :
Ni-diffused lithium niobate wide-angle Y-branch waveguide with proton-exchanged microprisms
Author :
Wei-Han Wang ; Way-Seen Wang
Author_Institution :
Dept. of Electr. Eng., Nat. Taiwan Univ., Taipei, Taiwan
Abstract :
A novel Ni-diffused Y-branch waveguide on LiNbO/sub 3/ using proton-exchanged microprism is presented. Experimental results show that the normalized transmitted power is 42% for a branching angle of 20/spl deg/.
Keywords :
Mach-Zehnder interferometers; diffusion; electro-optical modulation; etching; ion exchange; lithium compounds; micro-optics; nickel; optical fabrication; optical planar waveguides; optical prisms; LiNbO/sub 3/:Ni; Mach-Zehnder modulators; Ni-diffused Y-branch waveguide; fabrication process; normalized transmitted power; phase compensation rule; prism groove etching; proton-exchange mask; proton-exchanged microprism; wide-angle waveguide; Lithium niobate; Nickel; Optical buffering; Optical device fabrication; Optical films; Optical waveguides; Refractive index; Semiconductor films; Silicon; Substrates;
Conference_Titel :
Lasers and Electro-Optics, 2001. CLEO/Pacific Rim 2001. The 4th Pacific Rim Conference on
Conference_Location :
Chiba, Japan
Print_ISBN :
0-7803-6738-3
DOI :
10.1109/CLEOPR.2001.967742
