Title :
Three-dimensional micro-fabrication with two-photon and single-photon polymerization
Author_Institution :
Dept. of Appl. Phys., Osaka Univ., Japan
Abstract :
The theory, instrumentation and applications of three-dimensional microfabrication are given with a variety of examples. Structures shown include: SEM images of a 10 /spl mu/m bull and a micro-spring; a self-grown filament by the single photon process; self-merging of two fibers, and splitting into many fibers; and a photopolymer photonic crystal from the top and side views.
Keywords :
micro-optics; micromechanical devices; optical fabrication; optical fibre fabrication; optical polymers; photonic band gap; polymerisation; scanning electron microscopy; two-photon processes; 10 micron; SEM images; bull; fibers; instrumentation; micro-spring; photopolymer photonic crystal; self-grown filament; self-merging; single-photon polymerization; three-dimensional micro-fabrication; two-photon polymerization; Laser beams; Micromechanical devices; Nonlinear optics; Optical device fabrication; Optical microscopy; Optical polymers; Photonic crystals; Resins; Scanning electron microscopy; Ultrafast optics;
Conference_Titel :
Lasers and Electro-Optics, 2001. CLEO/Pacific Rim 2001. The 4th Pacific Rim Conference on
Conference_Location :
Chiba, Japan
Print_ISBN :
0-7803-6738-3
DOI :
10.1109/CLEOPR.2001.967843
