Polarisation-dependent performance of multiple wavelength electro-absorption intensity modulator arrays on a single InGaAs/InGaAsP chip

Author

Ng, S.L. ; Djie, H.S. ; Lim, H.S. ; Ooi, B.S. ; Lam, Y.L. ; Chan, Y.C. ; Dowd, P. ; Aimez, Vincent ; Beauvais, J. ; Beerens, J.

Author_Institution

Sch. of Electr. & Electron. Eng., Nanyang Technol. Univ., Singapore

Volume

1

fYear

2001

fDate

2001

Firstpage

40

Abstract

We report the fabrication of 10-channel electro-absorption (EA) modulator arrays using a lattice-matched InGaAs/InGaAsP MQW structure. The fabrication method is based on the combination of using gray mask lithography and a low-energy arsenic (As) ion-implantation induced disordering (IIID) process. To understand how the QWI process may affect polarisation performance, a theoretical model based on different rates of group III and group V interdiffusion has also been developed

Keywords

III-V semiconductors; chemical interdiffusion; electro-optical modulation; electroabsorption; gallium arsenide; gallium compounds; indium compounds; ion implantation; masks; optical arrays; optical communication equipment; optical fabrication; photoresists; semiconductor quantum wells; 10-channel electro-absorption modulator arrays; InGaAs-InGaAsP; InGaAs/InGaAsP chip; QWI process; fabrication method; gray mask lithography; interdiffusion; lattice-matched InGaAs/InGaAsP MQW structure; low-energy arsenic ion-implantation induced disordering; multiple wavelength electro-absorption intensity modulator arrays; polarisation performance; polarisation-dependent performance; Bandwidth; Chirp modulation; Energy measurement; Intensity modulation; Lithography; Photoconductivity; Polarization; Quantum well devices; Quantum well lasers; Semiconductor lasers;

fLanguage

English

Publisher

ieee

Conference_Titel

Lasers and Electro-Optics Society, 2001. LEOS 2001. The 14th Annual Meeting of the IEEE

Conference_Location

San Diego, CA

ISSN

1092-8081

Print_ISBN

0-7803-7105-4

Type

conf

DOI

10.1109/LEOS.2001.969162

Filename

969162