Title :
Widely tunable micromachined optical filter with adjustable tuning characteristics
Author :
Lin, Chien-chung ; Fu, Junxian ; Harris, James S., Jr.
Author_Institution :
Solid State & Photonics Lab., Stanford Univ., CA, USA
Abstract :
We designed a new tunable filter with a top DBR structure of Al 2O3/GaAs and demonstrated a tunable filter using this design. Adjustable tuning characteristics were achieved by removing excess nitride, providing greater yield during the release process, as well as being able to achieve a flexible structure afterward. The mechanical and optical measurements both demonstrate realization of a narrow linewidth, broad tuning range optical filter
Keywords :
alumina; gallium arsenide; micro-optics; micromachining; optical communication equipment; optical design techniques; optical tuning; optical waveguide filters; spectral line breadth; wavelength division multiplexing; Al2O3-GaAs; Al2O3/GaAs; adjustable tuning characteristics; broad tuning range optical filter; excess nitride; flexible structure; mechanical measurements; narrow linewidth; optical measurements; top DBR structure; tuning characteristics; widely tunable micromachined optical filter; Biomembranes; Distributed Bragg reflectors; Etching; Gallium arsenide; Laser tuning; Leg; Optical filters; Optical tuning; Tunable circuits and devices; Voltage;
Conference_Titel :
Lasers and Electro-Optics Society, 2001. LEOS 2001. The 14th Annual Meeting of the IEEE
Conference_Location :
San Diego, CA
Print_ISBN :
0-7803-7105-4
DOI :
10.1109/LEOS.2001.969293
