Array design consideration of the MEMS vibration energy harvester cantilever based structure: Top proof mass vs back etch mass vs interdigitated electrode design

Unexploited ambient vibration is scattered in the environment such as in the building, transportation, equipment or on the street. This untapped waste energy is low and varying in frequency and amplitude value. The wideband frequency MEMS Vibration Energy Harvesting (MVEH) is one of the preferable designs in harvesting or scavenging this ambient vibration energy. The energy harvested will be used for powering sensor node for Wireless Sensor Network (WSN) application. In this paper, three different design of the wideband cantilever based structure MVEH is simulated and the result of the simulated natural frequency, stress, amplitude and potential is plotted and discussed. The TPM design is the best choice in delivering high energy and small in size compare with the BEM and ITE design.