• DocumentCode
    3762841
  • Title

    Accelerated lifetime tests and failure analysis of an electro-thermally actuated MEMS valve

  • Author

    H. Skima;K. Medjaher;C. Varnier;N. Zerhouni;E. Dedu;J. Bourgeois

  • Author_Institution
    University of Franche-Comt? (UFC), FEMTO-ST Institute, UMR CNRS 6174 - UFC / ENSMM, 15B av. des Montboucons, Besan?on, France
  • fYear
    2015
  • Firstpage
    75
  • Lastpage
    78
  • Abstract
    This paper presents accelerated lifetime tests for an electro-thermally actuated MEMS valve in order to identify and analyze its failures. To perform the different tests, two experimental setup are specially designed. Tests consist in cycling several MEMS valves by changing at each test the operating condition: with unfiltered air, without air and with filtered air. Results show that different failure mechanisms can be detected depending on the operating conditions of the MEMS valve.
  • Keywords
    "Reliability","Valves","Micromechanical devices","Fluids","Biomedical imaging","Pins","Lifetime estimation"
  • Publisher
    ieee
  • Conference_Titel
    Microelectronics (ICM), 2015 27th International Conference on
  • Electronic_ISBN
    2159-1679
  • Type

    conf

  • DOI
    10.1109/ICM.2015.7437991
  • Filename
    7437991
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3762841