• DocumentCode
    3763133
  • Title

    A method to measure displacement of microscale structures with high resolution and large stroke for cellular characterization

  • Author

    Hirotaka Sugiura;Shinya Sakuma;Makoto Kaneko;Fumihito Arai

  • Author_Institution
    Dept. of Micro-Nano Systems Engineering, Nagoya University, Furo-cho, Chilisa-ku, 464-8603, JAPAN
  • fYear
    2015
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    We propose a method to measure displacement of microscale structures with high sensing resolution and large stroke on focal plane of microscopy. Using this method, measurable displacement become approximately 10 times larger than that of the conventional method, and the resolution is kept as small as tens nm order.
  • Keywords
    "Image resolution","Sensors","Gray-scale"
  • Publisher
    ieee
  • Conference_Titel
    Micro-NanoMechatronics and Human Science (MHS), 2015 International Symposium on
  • Type

    conf

  • DOI
    10.1109/MHS.2015.7438287
  • Filename
    7438287
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3763133