In situ nanomanipulation with 3D SEM-CT observation inside environmental SEM

In situ nanomanipulation system is presented with 3D scanning electron microscope - computed tomography (SEM-CT) system integrated with inside an environmental - SEM (E-SEM). The E-SEM was used to achieve a real-time high resolution imaging for high precision nanomanipulation. The SEM-CT system was used for obtaining 3D cross-sectional image with sub-micron high resolution. In this paper, Caenorhabditis elegans (C. elegans) was used as a target of biological sample to demonstrate a nanoinjection operation. The nanoinjection was determined by the SEM-CT system with its 3D information.