Title :
Nanopatteming in GeTe phase change materials using heated atomic force microscope tips
Author :
Adrian Podpirka;Woo-Kyung Lee;Todd Brintlinger;Nabil Bassim;Paul E. Sheehan;Laura Ruppalt
Author_Institution :
United States Naval Research Laboratory
Abstract :
Patterning surfaces leads to the creation of physiochemical heterogeneities (i.e. surface energy, chemical reactivity, conductivity, topography, etc) which are important to the design of complex components used in modern electronics. The ability to control patterns and write and rewrite circuits is critical for adaptive learning in future electronic devices.
Conference_Titel :
Nanotechnology Materials and Devices Conference (NMDC), 2015 IEEE
DOI :
10.1109/NMDC.2015.7439263