Title :
Modeling of widely tunable micromachined surface emitting laser with warped cantilever
Author :
Amano, T. ; Koyama, F. ; Iga, K.
Author_Institution :
Microsyst. Res. Center, Tokyo Inst. of Technol., Yokohama, Japan
Abstract :
We propose a widely tunable micromachined surface emitting laser with a strain control layer. We present the possibility of a wide continuous wavelength tuning range of over 70 nm by warping the cantilever to widen the air gap.
Keywords :
distributed Bragg reflector lasers; laser tuning; micro-optics; micromachining; semiconductor lasers; strain control; surface emitting lasers; Ga/sub 0.2/Al/sub 0.8/As-GaAs; GaAlAs/GaAs DBRs; VCSEL; air gap widening; electrostatic force tuning; enhanced tuning range; modeling; strain control layer; warped cantilever; wide continuous wavelength tuning range; widely tunable micromachined surface emitting laser; Distributed Bragg reflectors; Gallium arsenide; Laser modes; Laser tuning; Lattices; Semiconductor lasers; Strain control; Surface emitting lasers; Tunable circuits and devices; Vertical cavity surface emitting lasers;
Conference_Titel :
Lasers and Electro-Optics, 2001. CLEO/Pacific Rim 2001. The 4th Pacific Rim Conference on
Conference_Location :
Chiba, Japan
Print_ISBN :
0-7803-6738-3
DOI :
10.1109/CLEOPR.2001.971105
