Title :
Design of MEMS based MWCNT/epoxy strain sensor using ANSYS
Author :
Gaurav Sapra;Manu Sharma;Preetika Sharma;Srishti Prasad
Author_Institution :
Electrical and Electronics, U.I.E.T, Panjab University, Chandigarh, INDIA
Abstract :
This paper entails the study and simulation of a MEMS based MWCNT/Epoxy strain sensor using ANSYS CAE software. The proposed sensor design comprises of freestanding SU-8 based U-shaped cantilever beam integrated with MWCNT/Epoxy piezoresistors as an active elements. MWCNT/Epoxy thin film composite has been deposited at the cantilever fulcrum (anchor) point as a piezoresistors. Analytical simulations have been performed by applying a given load at the tip of the U-shaped cantilever to record its deflection and locate the regions of maximum/minimum stress and strains. These results are then interpreted to understand the sensitivity of the device.
Keywords :
"Strain","Micromechanical devices","Structural beams","Sensitivity","Polymers","Finite element analysis","Stress"
Conference_Titel :
Recent Advances in Engineering & Computational Sciences (RAECS), 2015 2nd International Conference on
DOI :
10.1109/RAECS.2015.7453383
