WR-1.5 band waveguide bandpass dual-mode filter on silicon micromachining technique

In this article, WR-1.5 rectangular waveguide cavity bandpass dual-mode filter based on silicon micromaching technique is designed. The filter consists of only two TE₁₀₂/TE₂₀₁ dual-mode cavities with four poles and two transmission zeros. The proposed filter is fabricated using the deep reactive ion etching (DRIE) micromachining on silicon wafers, with sputtering gold to inner and outer surface so as to realize metallization. Using Ansoft HFSS 13.0, the center frequency of filter is 650 GHz and the fractional bandwidth is 1.6%. The minimum in-band insertion loss is 2.18dB, and the in-band return loss is better than 18.42dB. One transmission zero is located on the passband´s lower side at 633.8 GHz while the second transmission zero is located on the upper side at 665.1 GHz.