Title :
Silicon MEMS oscillators for high speed digital systems
Author :
Aaron Partridge;Sassan Tabatabaei
Author_Institution :
SiTime?, USA
Abstract :
Presents a collection of slides that cover the following topics: quartz; MEMS oscillators; MEMS resonator fabrication; PLL; packaging; IC-level reliability; clocks; high speed digital systems; state machine clocking; parallel communication clocking; serial communication clocking; and technology transitions.
Keywords :
"Micromechanical devices","Oscillators","Digital systems","Silicon","Resonators","Fabrication"
Conference_Titel :
Hot Chips 21 Symposium (HCS), 2009 IEEE
DOI :
10.1109/HOTCHIPS.2009.7478376
