Title :
Development of titanium nitride coating for SNS ring vacuum chambers
Author :
He, P. ; Hseuh, H.C. ; Mapes, M. ; Todd, R. ; Weiss, D.
Author_Institution :
Collider-Accelerator Dept., Brookhaven Nat. Lab., Upton, NY, USA
Abstract :
The inner surface of the ring vacuum chambers of the US Spallation Neutron Source (SNS) will be coated with ~100 nm of Titanium Nitride (TiN). This is to minimize the secondary electron yield (SEY) from the chamber wall, and thus avoid the so-called e-p instability caused by electron multipacting as observed in a few high-intensity proton storage rings. Both DC sputtering and DC-magnetron sputtering were conducted in a test chamber of relevant geometry to SNS ring vacuum chambers. Auger Electron Spectroscopy (AES) and Rutherford Back Scattering (RBS) were used to analyze the coatings for thickness, stoichiometry and impurity. Excellent results were obtained with magnetron sputtering. The development of the parameters for the coating process and the surface analysis results are presented
Keywords :
Auger electron spectra; Rutherford backscattering; beam handling equipment; impurity states; neutron sources; protective coatings; proton accelerators; sputtered coatings; stoichiometry; storage rings; surface phenomena; thickness measurement; titanium compounds; vacuum apparatus; 100 nm; AES; Auger electron spectroscopy; DC sputtering; DC-magnetron sputtering; RBS; Rutherford back scattering; SNS ring vacuum chambers; TiN; US Spallation Neutron Source; chamber wall; coating process; electron multipaction; electron-proton instability; high-intensity proton storage rings; impurity; inner surface; secondary electron yield; stoichiometry; surface analysis; thickness; titanium nitride coating; Coatings; Electrons; Magnetic analysis; Neutrons; Protons; Sputtering; Storage rings; Testing; Tin; Titanium;
Conference_Titel :
Particle Accelerator Conference, 2001. PAC 2001. Proceedings of the 2001
Conference_Location :
Chicago, IL
Print_ISBN :
0-7803-7191-7
DOI :
10.1109/PAC.2001.987309
