Research for effect of dirt defect of quartz wafer on its electrical parameters

Research the effect of dirt of quartz wafer on its electrical parameters. Experimental and theoretical analysis results show that the dirt of quartz wafer affects its mass, elastic modulus and vibration damping, and leads to increase of dynamic inductance, decrease of dynamic capacitance, reduction of resonant frequency and increase of resonance resistance. Effect of the dirt on the electrical parameters of quartz wafer is related to not only its magnitude, but also its location, materials and other factors.This study on quartz wafer appearance defects for improving the quartz wafer automatic sorting technology in our country and setting up the unified and objective testing standards of quartz wafer has important significance.