On-chip temperature-control and simulation of dual-mass micro-gyroscope

This paper presents the structure design, working principles and heat transformation of the on-chip temperature-control for dual-mass micro-gyroscope. The dedicated temperature sensor and heater provide real-time monitored and controlled working environment for the micro-gyroscope, thermal stabilization is thus achieved by maintaining the gyroscope temperature larger than the highest temperature of the surroundings. Moreover, thin glass membrane is formed and hermetic vacuum encapsulation is implemented help improve the heat insulation and reduce the power consumption. Finally, FEM analyses are performed and results from the simulations validate the practicability of the on-chip temperature-control system.