The research of microscopic vision and force sensing signal feedback hybrid position control on cochlear microelectrode testing system

For cochlear microelectrode array the current way of testing is manual operation and it exist technical problems such as difficult to precision positioning, easy to damage electrode surface. The microelectrode automated testing system is developed with the visual image deflection and force feedback hybrid position control. The experimental results show that the use of image information to achieve the positioning error within 20 µm; using force feedback for the position fine-tuning of the probe detecting, keep testing force in 80–150 mN and the error is within 10 mN. Meet the requirement of testing for precise positioning and flexible contact.