DocumentCode
3779724
Title
Contents
fYear
1987
fDate
5/1/1987 12:00:00 AM
Abstract
The following topics are dealt with: lithography; thin insulators; bipolar devices; hot carriers; refractory metal technology; interconnect technology; MOS devices; MOS memory; and MOS circuits.
Publisher
ieee
Conference_Titel
VLSI Technology, 1987. SymVLSITech 1987. Symposium on
Print_ISBN
978-1-5090-3151-1
Type
conf
Filename
7508750
Link To Document