A CMOS A/D converter on laser recrystallized SOI with controlling the crystal growth direction

The new laser recrystallization technique which enabled to form the (001) textured SOI with few crystalline defects was developed, and successfully applied for CMOS ICs with analog function for the first time. This technique will widely contribute to the higher performance and the larger scale integration of CMOS-ICs and/or 3-D ICs.