Enhancement of IC tray´s surface conductivity using accelerator technology

Author

Lee, J.S. ; Kil, J.K. ; Ha, J.H. ; Lee, J.H. ; Choi, B.H.

Author_Institution

Korea Atomic Energy Research Institute, Taejon, South Korea

Volume

4

fYear

2001

fDate

2001

Firstpage

2799

Abstract

We designed and manufactured a high current ion source for ion beam applications. As an industrial application, we studied the relation between bombarding nitrogen fluence and surface resistivity on MPPO (modified polyphenylene oxide) material, which is used for the IC tray, using the high current ion implantation technology. During the transportation, electrical charge is induced on the tray surface and it generates an electrical shock into the IC chip. To prevent such damage, we developed an implantation process for IC tray surface modification, which was carried out at an accelerating energy of 50 keV and an ion beam current of 50 mA. The surface resistivity of the MPPO IC tray that is normally insulating was decreased in the range of 10¹² to 10⁶ Ω/sq by increasing the total dose from 7×10 ¹⁴ ions/cm² to 8×10¹⁶ ions/cm²

Keywords

integrated circuit packaging; integrated circuit technology; ion beam applications; ion implantation; polymers; surface charging; surface conductivity; surface treatment; 50 keV; 50 mA; IC tray; MPPO; N ion fluence; N ion total dose dependence; accelerating energy; accelerator technology; high current ion source; implantation process; industrial application; ion beam applications; ion beam current; modified polyphenylene oxide; surface conductivity; surface modification; Acceleration; Application specific integrated circuits; Conducting materials; Conductivity; Industrial relations; Ion accelerators; Ion beam applications; Ion sources; Manufacturing industries; Nitrogen;

fLanguage

English

Publisher

ieee

Conference_Titel

Particle Accelerator Conference, 2001. PAC 2001. Proceedings of the 2001

Conference_Location

Chicago, IL

Print_ISBN

0-7803-7191-7

Type

conf

DOI

10.1109/PAC.2001.987911

Filename

987911