Accelerated testing of silicon dioxide wearout

Oxide lifetime extrapolation using log(t_BD) or better log(Q_BD) against 1/ E_ox plot is more accurate and has a theoretical basis. Highly accelerated oxide test completed in seconds appears to be feasible. The acceleration factor is also a function of the severity of the oxide defect. Extrapolation of defect-related break-down lifetime can be performed assuming an effective oxide thinning for defects.