Movable parallel plate RF MEMS switch with wide frequency response

A novel RF MEMS switch with two parallel suspending bridges is designed for wide frequency range. This paper reports, how change in the area of capacitive actuators can be used to achieve wider bandwidth. Change in parallel plate width from 50 μm to 150 μm, up state switch yields an insertion loss lower than 0.5 dB and return loss down to 25 dB in the range of 15-47.5 GHz. Down state switch yields return loss lower than 0.5 dB and isolation down to 25 dB at the same frequency range.