Title :
Properties of tantalum oxide formed on sputtered tantalum
Author :
R. W. Berry;D. J. Sloan
Author_Institution :
Bell Telephone Laboratories, Inc. Murray Hill, New Jersey
Abstract :
Tantalum has been sputtered onto glass microscope slides to form films of tantalum in the thickness range of from 4000 to 10000 Angstrom units. These films, whose surfaces are nearly optically flat, provide a very smooth material, which has had no mechanical or chamical polishing, on which anodically formed tantalum oxide may be investigated.
Keywords :
"Tantalum","Films","Resistance","Gold","Radiation detectors","Electrodes","Conductivity"
Conference_Titel :
Electrical Insulation, 1958 Conference On
Print_ISBN :
978-1-5090-3135-1
DOI :
10.1109/CEI.1958.7513546
