Driver circuit system for temperature control of micro-hotplates: Measurement and strategy

Micro hotplate (MHP) is a widely used temperature controlling platform for semiconductor gas sensors. The gas sensors performances including sensitivity, selectivity and response properties are temperature sensitive, therefore, the precise control of working temperature by the MHP is critical for these sensors. To improve the temperature control accuracy, besides the optimization of circuit structure which is commonly used, this paper also proposes a heating strategy according to the factors obtained from circuit test to achieve higher thermal accuracy by adjusting the circuit control parameters.