Title :
Application of cellulose triacetate as biocompatible/biodegradable dielectrics in EWOD devices
Author :
Lei Chao;Zhi Zeng;Kaidi Zhang;Wei Wang;Jia Zhou
Author_Institution :
ASIC and System State Key Lab, School of Microelectronics, Fudan University, Shanghai 200433, China
Abstract :
As a biocompatible/biodegradable material, cellulose triacetate (CTA) is used as dielectric layers in EWOD (electrowetting-on-dielectrics) devices. The CTA has a dielectric constant of 10 by spin-coating and annealing at 100°C in electrothermal drying oven for 30min. The porosity, unevenness and stability of electrowetting of CTA are studied. The results show its good property of film deposition and negative-potential sensitive electroewetting. An EWOD device with 1.2 μm thick CTA layer has been tested, demonstrating that water droplets can be driven and mixed successfully.
Keywords :
"Dielectrics","Voltage measurement","Indium tin oxide","Electrodes","Films","Dielectric measurement","Temperature measurement"
Conference_Titel :
ASIC (ASICON), 2015 IEEE 11th International Conference on
Print_ISBN :
978-1-4799-8483-1
Electronic_ISBN :
2162-755X
DOI :
10.1109/ASICON.2015.7517019
