DocumentCode
3781254
Title
Application of cellulose triacetate as biocompatible/biodegradable dielectrics in EWOD devices
Author
Lei Chao;Zhi Zeng;Kaidi Zhang;Wei Wang;Jia Zhou
Author_Institution
ASIC and System State Key Lab, School of Microelectronics, Fudan University, Shanghai 200433, China
fYear
2015
Firstpage
1
Lastpage
4
Abstract
As a biocompatible/biodegradable material, cellulose triacetate (CTA) is used as dielectric layers in EWOD (electrowetting-on-dielectrics) devices. The CTA has a dielectric constant of 10 by spin-coating and annealing at 100°C in electrothermal drying oven for 30min. The porosity, unevenness and stability of electrowetting of CTA are studied. The results show its good property of film deposition and negative-potential sensitive electroewetting. An EWOD device with 1.2 μm thick CTA layer has been tested, demonstrating that water droplets can be driven and mixed successfully.
Keywords
"Dielectrics","Voltage measurement","Indium tin oxide","Electrodes","Films","Dielectric measurement","Temperature measurement"
Publisher
ieee
Conference_Titel
ASIC (ASICON), 2015 IEEE 11th International Conference on
Print_ISBN
978-1-4799-8483-1
Electronic_ISBN
2162-755X
Type
conf
DOI
10.1109/ASICON.2015.7517019
Filename
7517019
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