• DocumentCode
    3782167
  • Title

    Multifunctional system for photometrical measurements of semiconductor structures

  • Author

    J. Zajac;P. Machalica;A. Kudla

  • Author_Institution
    Ind. Inst. of Electron., Warsaw, Poland
  • Volume
    3
  • fYear
    1999
  • Firstpage
    1930
  • Abstract
    In the paper a new multifunctional system for photometrical measurements of semiconductor structures is presented. The system is able to measure very accurately photocurrent as low as 100 aA. The measured structure can be stimulated by DC voltage and light having defined power and wavelength. The software of the system cooperates with databases, which enables repetition of completed previous measurements, as well as full restoration of results.
  • Keywords
    "Photometry","Wavelength measurement","Position measurement","Capacitance-voltage characteristics","Dielectric measurements","Probes","Photoconductivity","Parameter estimation","Ultra large scale integration","Voltage"
  • Publisher
    ieee
  • Conference_Titel
    Instrumentation and Measurement Technology Conference, 1999. IMTC/99. Proceedings of the 16th IEEE
  • ISSN
    1091-5281
  • Print_ISBN
    0-7803-5276-9
  • Type

    conf

  • DOI
    10.1109/IMTC.1999.776156
  • Filename
    776156
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3782167