Title :
Multifunctional system for photometrical measurements of semiconductor structures
Author :
J. Zajac;P. Machalica;A. Kudla
Author_Institution :
Ind. Inst. of Electron., Warsaw, Poland
Abstract :
In the paper a new multifunctional system for photometrical measurements of semiconductor structures is presented. The system is able to measure very accurately photocurrent as low as 100 aA. The measured structure can be stimulated by DC voltage and light having defined power and wavelength. The software of the system cooperates with databases, which enables repetition of completed previous measurements, as well as full restoration of results.
Keywords :
"Photometry","Wavelength measurement","Position measurement","Capacitance-voltage characteristics","Dielectric measurements","Probes","Photoconductivity","Parameter estimation","Ultra large scale integration","Voltage"
Conference_Titel :
Instrumentation and Measurement Technology Conference, 1999. IMTC/99. Proceedings of the 16th IEEE
Print_ISBN :
0-7803-5276-9
DOI :
10.1109/IMTC.1999.776156
