Micromachined GaAlAs/GaAs vertical cavity tunable filter with enhanced thermal tuning range

Author

Amano, T. ; Koyama, F. ; Arai, M. ; Miyamoto, T. ; Iga, K.

Author_Institution

Precision & Intelligence Lab., Tokyo Inst. of Technol., Yokohama, Japan

Volume

2

fYear

2001

fDate

2001

Firstpage

216

Abstract

We have proposed a novel micromachined vertical cavity tunable filter with a thermal strain control layer, which enables wavelength tuning induced by heating. We show the possibility of a large tuning range of over 100 nm. Experimentally, we demonstrate both negative and positive wavelength tuning for micromachined GaAlAs/GaAs filters.

Keywords

III-V semiconductors; gallium arsenide; gallium compounds; micromachining; micromechanical devices; optical filters; optical tuning; strain control; surface emitting lasers; GaAlAs-GaAs; III V semiconductors; MEMS technology; VCSEL; WDM; micromachined cantilever; micromachined vertical cavity tunable filter; negative wavelength tuning; positive wavelength tuning; thermal strain control layer; thermal tuning range; vertical cavity surface-emitting laser; Distributed Bragg reflectors; Electrostatics; Filters; Gallium arsenide; Heating; Laser tuning; Strain control; Thermal expansion; Tunable circuits and devices; Vertical cavity surface emitting lasers;

fLanguage

English

Publisher

ieee

Conference_Titel

Optical Communication, 2001. ECOC '01. 27th European Conference on

Print_ISBN

0-7803-6705-7

Type

conf

DOI

10.1109/ECOC.2001.988889

Filename

988889