Title :
Metallic thin films for sensor operating temperature control
Author :
N. Santa;O. Bodea;C. Roman;B. Abraham;E. Cordos;I. Manoviciu
Author_Institution :
Res. Inst. for Anal. Instrum., Cluj-Napoca, Romania
Abstract :
Metallic resistors based on thin film have been realized: nickel onto ceramic substrate, platinum-rhodium alloy onto ceramic and glass substrates. The influence of the thermal treatment on absolute and relative resistance values and on the temperature coefficient resistance has been studied. Also, the dependence of the resistance values and temperature coefficient resistance vs. temperature over the range of -10...+180/spl deg/C was studied too. It has been ascertained that Ni TCR is higher cca. 3 times than Pt-Rh TCR and also that the TCR value depends on the substrate type.
Keywords :
"Thin film sensors","Temperature sensors","Temperature control","Substrates","Thermal resistance","Ceramics","Resistors","Transistors","Nickel alloys","Platinum alloys"
Conference_Titel :
Semiconductor Conference, 1999. CAS ´99 Proceedings. 1999 International
Print_ISBN :
0-7803-5139-8
DOI :
10.1109/SMICND.1999.810591
