Analogue behavioural simulator as a tool for coupled electro-thermal analysis of microsystems

In many microsystems, thermal effects have significant importance and electro-thermal simulation is necessary to shorten the product development cycle. The possibilities for space-continuous simulation of electrothermal problems by using an analogue simulator and an analogue hardware description language have been described. In comparison to commercial finite element simulators, the relative error of thermal simulation is less than 0.08% for three-dimensional static analyses. Transient thermal problems with coupled electronic components have been simulated.