Title :
Micromachined experimental structure for optimization of multilayer p/sup +/Si/(metal, semiconductor) thermopile IR detectors and thermal converters
Author :
D. Randjelovic;Z. Djuric;R. Petrovic;Z. Lazic;T. Dankovic
Author_Institution :
Inst. of Microelectron. Technol. & Single Crystals, Belgrade Univ., Serbia
Abstract :
This paper presents the design and fabrication technique of a test structure with p/sup +/Si/metal and p/sup +/Si/sputtered-Si thermopiles intended for optimization of performance of multilayer thermopile IR detectors and thermal converter. An experimental structure is fabricated using micromachining techniques.
Keywords :
"Nonhomogeneous media","Fabrication","Testing","Temperature sensors","Thermal sensors","Gold","Temperature dependence","Semiconductor device measurement","Silicon","Infrared detectors"
Conference_Titel :
Microelectronics, 2000. Proceedings. 2000 22nd International Conference on
Print_ISBN :
0-7803-5235-1
DOI :
10.1109/ICMEL.2000.838761
