DocumentCode
3782846
Title
A simple model for the threshold voltage of polysilicon TFT which include both grain and grain boundary trapping states
Author
D.M. Petkovic
Author_Institution
Fac. of Natural Sci., Pristina Univ., Serbia
Volume
1
fYear
2000
Firstpage
229
Abstract
In this paper, a simple procedure for approximate evaluation of threshold voltage of polysilicon TFT is reported. This procedure takes into account the effect of total depletion of polycrystalline grains. Also, the presented model includes both grain and grain boundary trapping states, and assumes different distributions of these states in the energy gap. Calculations of threshold voltage dependencies on grain size, dopant concentration, and temperature have been reported and discussed.
Keywords
"Threshold voltage","Thin film transistors","Grain boundaries","Grain size","Semiconductor process modeling","Energy measurement","Probability distribution","Electron traps","Temperature dependence","MOSFETs"
Publisher
ieee
Conference_Titel
Microelectronics, 2000. Proceedings. 2000 22nd International Conference on
Print_ISBN
0-7803-5235-1
Type
conf
DOI
10.1109/ICMEL.2000.840562
Filename
840562
Link To Document