Title :
Application of an algebraic multigrid solver to process simulation problems
Author :
T. Fullenbach;K. Stuben;S. Mijalkovic
Author_Institution :
Inst. for Algorithms & Sci. Comput., German Nat. Res. Center for Inf. Technol., Sankt Augustin, Germany
Abstract :
In this paper, the performance of a special algebraic multigrid (AMG) solver for the solution of stress analysis problems in process simulation has been investigated. The discrete stress analysis equations are generated directly by the process simulator. The practical simulation examples include stress analysis during natively growing and deposited material films. It is shown that approaches using the AMG solver as a preconditioner are better than standard iterative solvers with regard to computing times and convergence behavior. A further comparison demonstrates that these AMG approaches are faster than the SuperLU direct solver.
Keywords :
"Stress","Computational modeling","Analytical models","Equations","Multigrid methods","Elasticity","Semiconductor materials","Fabrication","Viscosity","Information technology"
Conference_Titel :
Simulation of Semiconductor Processes and Devices, 2000. SISPAD 2000. 2000 International Conference on
Print_ISBN :
0-7803-6279-9
DOI :
10.1109/SISPAD.2000.871249