• DocumentCode
    3783040
  • Title

    Application of an algebraic multigrid solver to process simulation problems

  • Author

    T. Fullenbach;K. Stuben;S. Mijalkovic

  • Author_Institution
    Inst. for Algorithms & Sci. Comput., German Nat. Res. Center for Inf. Technol., Sankt Augustin, Germany
  • fYear
    2000
  • Firstpage
    225
  • Lastpage
    228
  • Abstract
    In this paper, the performance of a special algebraic multigrid (AMG) solver for the solution of stress analysis problems in process simulation has been investigated. The discrete stress analysis equations are generated directly by the process simulator. The practical simulation examples include stress analysis during natively growing and deposited material films. It is shown that approaches using the AMG solver as a preconditioner are better than standard iterative solvers with regard to computing times and convergence behavior. A further comparison demonstrates that these AMG approaches are faster than the SuperLU direct solver.
  • Keywords
    "Stress","Computational modeling","Analytical models","Equations","Multigrid methods","Elasticity","Semiconductor materials","Fabrication","Viscosity","Information technology"
  • Publisher
    ieee
  • Conference_Titel
    Simulation of Semiconductor Processes and Devices, 2000. SISPAD 2000. 2000 International Conference on
  • Print_ISBN
    0-7803-6279-9
  • Type

    conf

  • DOI
    10.1109/SISPAD.2000.871249
  • Filename
    871249