Title :
A MEMS variable optical attenuator
Author :
R. Wood;V. Dhuler;E. Hill
Author_Institution :
Cronos Integrated Microsyst., Research Triangle Park, NC, USA
Abstract :
The need for smaller and more capable attenuators has motivated the application of MEMS technology to produce a compact variable optical attenuator suitable for optical telecommunications environments. In this paper we describe a silicon-MEMS device that employs a simple thermal actuator to variably move a gold/silicon attenuation vane into the optical path.
Keywords :
"Micromechanical devices","Optical attenuators","Blades","Optical beams","Actuators","Optical sensors","Temperature","Optical fiber networks","Optical amplifiers","Silicon"
Conference_Titel :
Optical MEMS, 2000 IEEE/LEOS International Conference on
Print_ISBN :
0-7803-6257-8
DOI :
10.1109/OMEMS.2000.879656
