• DocumentCode
    3783118
  • Title

    A MEMS variable optical attenuator

  • Author

    R. Wood;V. Dhuler;E. Hill

  • Author_Institution
    Cronos Integrated Microsyst., Research Triangle Park, NC, USA
  • fYear
    2000
  • Firstpage
    121
  • Lastpage
    122
  • Abstract
    The need for smaller and more capable attenuators has motivated the application of MEMS technology to produce a compact variable optical attenuator suitable for optical telecommunications environments. In this paper we describe a silicon-MEMS device that employs a simple thermal actuator to variably move a gold/silicon attenuation vane into the optical path.
  • Keywords
    "Micromechanical devices","Optical attenuators","Blades","Optical beams","Actuators","Optical sensors","Temperature","Optical fiber networks","Optical amplifiers","Silicon"
  • Publisher
    ieee
  • Conference_Titel
    Optical MEMS, 2000 IEEE/LEOS International Conference on
  • Print_ISBN
    0-7803-6257-8
  • Type

    conf

  • DOI
    10.1109/OMEMS.2000.879656
  • Filename
    879656
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3783118