Title :
Electrical properties of 2DEG in GaAs/InGaP based structures
Author :
R. Kudela;M. Morvic;M. Kucera;S. Kicin;J. Novak
Author_Institution :
Inst. of Electr. Eng., Slovak Acad. of Sci., Bratislava, Slovakia
Abstract :
Electrical properties of 2DEGs in GaAs/InGaP structures were studied in this paper. The structures were grown by LP MOVPE at various temperatures. The influence of growth temperature and the optimisation of the growth process of interfaces on the Hall mobilities were examinated. Correlations between morphology, optical properties and Hall mobilities at 77 K were observed. The thickness of the spacer, which separated the 2DEG channel from the doping region, had also a significant influence on the mobilities. Properties of the structures with GaAs and InGaAs channels are presented. Hall mobilities of 46000 cm/sup 2/V/sup -1/s/sup -1/ were achieved in the GaAs/InGaP structures.
Keywords :
"Gallium arsenide","Morphology","Anisotropic magnetoresistance","Inductors","Doping","Hall effect","Epitaxial growth","Epitaxial layers","Temperature","Indium gallium arsenide"
Conference_Titel :
Advanced Semiconductor Devices and Microsystems, 2000. ASDAM 2000. The Third International EuroConference on
Print_ISBN :
0-7803-5939-9
DOI :
10.1109/ASDAM.2000.889486
