Title :
Non-equilibrium plasmas in telecommunication related technologies
Author :
Z.L. Petrovic;Z.M. Raspopovic;T. Makabe
Author_Institution :
Inst. of Phys., Belgrade Univ., Yugoslavia
fDate :
6/23/1905 12:00:00 AM
Abstract :
We give a review of some of the advances in modeling of ionized gases and their implications in telecommunications. In particular we discuss the gas breakdown due to RF and microwave fields, the multipacting discharges and the RF discharges used for integrated circuit processing.
Keywords :
"Gases","Physics","Electrons","Plasma materials processing","Atmosphere","Plasma chemistry","Fault location","Production","Electric breakdown","Radiofrequency integrated circuits"
Conference_Titel :
Telecommunications in Modern Satellite, Cable and Broadcasting Service, 2001. TELSIKS 2001. 5th International Conference on
Print_ISBN :
0-7803-7228-X
DOI :
10.1109/TELSKS.2001.955801
