DocumentCode :
3784162
Title :
Microelectromechanical systems: a new technology for biomedical applications
Author :
M.R. Neurnan;R.B. Fair;M. Mehregany;H.Z. Massoud
Author_Institution :
Case Western Reserve University
fYear :
1993
fDate :
6/15/1905 12:00:00 AM
Firstpage :
1545
Lastpage :
1546
Keywords :
"Microelectromechanical systems","Microelectronics","Microelectromechanical devices","Micromechanical devices","Etching","Silicon","Fabrication","Integrated circuit technology","Micromachining","Biomedical electrodes"
Publisher :
ieee
Conference_Titel :
Engineering in Medicine and Biology Society, 1993. Proceedings of the 15th Annual International Conference of the IEEE
Print_ISBN :
0-7803-1377-1
Type :
conf
DOI :
10.1109/IEMBS.1993.979274
Filename :
979274
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=3784162
