Exact analysis of dispersive SAW devices on ZnO/diamond/Si layered structures

Author

Wu, T.T. ; Chen, Y.Y.

Author_Institution

Inst. of Appl. Mech., Nat. Taiwan Univ., Taipei, Taiwan

Volume

1

fYear

2001

fDate

2001

Firstpage

107

Abstract

A formulation for calculating the effective permittivity of a piezoelectric layered SAW structure is given and the exact frequency response of ZnO/diamond/Si layered SAW calculated. The frequency response of an unapodized SAW transducer is calculated and the center frequency shift due to the velocity dispersion explained. In addition, the electromechanical coupling coefficients of the ZnO/diamond/Si layered half space based on two different formulae are calculated and discussed. Finally, based on the results of the study, we propose a method for modeling the layered SAW device. The advantage of using the effective permittivity method is that not only the null frequency bandwidth but also the center frequency shift and insertion loss can be evaluated

Keywords

diamond; electromechanical effects; frequency response; interdigital transducers; permittivity; silicon; surface acoustic wave devices; surface acoustic wave transducers; zinc compounds; ZnO-C-Si; ZnO/diamond/Si layered structures; center frequency shift; dispersive SAW devices; effective permittivity; electromechanical coupling coefficients; exact frequency response; insertion loss; modeling; null frequency bandwidth; piezoelectric layered SAW structure; unapodized SAW transducer; velocity dispersion; Bandwidth; Dispersion; Electrodes; Frequency response; Permittivity; Piezoelectric transducers; Surface acoustic wave devices; Surface acoustic waves; Surface waves; Zinc oxide;

fLanguage

English

Publisher

ieee

Conference_Titel

Ultrasonics Symposium, 2001 IEEE

Conference_Location

Atlanta, GA

Print_ISBN

0-7803-7177-1

Type

conf

DOI

10.1109/ULTSYM.2001.991589

Filename

991589