Title :
SAW propagation in LiNbO3 damaged by E-beam
Author :
Kryshtal, R.G. ; Medved, A.V.
Author_Institution :
Inst. of Radio Eng. & Electron., Acad. of Sci., Fryazino, Russia
Abstract :
Measurement results on phase changes of SAW passing through a waveguide structure fabricated on LiNbO3 plate by lithography with photoresist patterning by E-beam without any photomask are presented. Discontinuities and hysteresis in the phase versus temperature dependence in nitrogen atmosphere as well as large SAW phase changes (⩾ 180 degrees) as vapors of water containing analyte adsorption on the sample surface have been observed. Qualitative explanation of the results based on the reconstruction of the ferroelectric microdomain structure in E-beam damaged LiNbO3 as temperature changes and with the formation of a thin film of water on the sample surface is suggested
Keywords :
acoustic wave propagation; electron beam effects; ferroelectric materials; lithium compounds; surface acoustic waves; LiNbO3; SAW phase changes; SAW propagation; discontinuities; electron beam; hysteresis; lithography; phase changes; photoresist patterning; waveguide; Atmospheric measurements; Hysteresis; Lithography; Nitrogen; Phase measurement; Resists; Surface acoustic waves; Surface reconstruction; Temperature dependence; Waveguide transitions;
Conference_Titel :
Ultrasonics Symposium, 2001 IEEE
Conference_Location :
Atlanta, GA
Print_ISBN :
0-7803-7177-1
DOI :
10.1109/ULTSYM.2001.991616
