Mode interference study of bulk acoustic wave liquid sensors

Author

Zhang, Chao ; Vetelino, John F.

Author_Institution

The Lubrizol Corp., Wickliffe, OH, USA

Volume

1

fYear

2001

fDate

2001

Firstpage

347

Abstract

The impedance of thickness shear mode (TSM) quartz resonators, which are very sensitive to the liquid electrical property changes, has been investigated. Resonators with a ring shape electrode were exposed to a NaCl solution of varying concentrations and it was found that mode interference between the primary and spurious mode occurred. The results show that as the inner diameter of the ring electrode increases, a spurious mode appears with increasing mode strength and the frequency spacing between the spurious mode and the primary TSM decreases. For a resonator with the same sensing electrode, the strength and center frequency of the spurious mode change as the NaCl concentration varies. Theoretical analysis of the mode interference based on a liquid lossy electrode is presented

Keywords

bulk acoustic wave devices; chemical sensors; crystal resonators; NaCl; NaCl solution; SiO₂; bulk acoustic wave liquid sensor; electrical impedance; liquid lossy electrode; mode interference; ring electrode; spurious mode; thickness shear mode quartz resonator; Acoustic sensors; Acoustic waves; Conductivity; Electrodes; Frequency; Geometry; Interference; Permittivity measurement; Q factor; Shape;

fLanguage

English

Publisher

ieee

Conference_Titel

Ultrasonics Symposium, 2001 IEEE

Conference_Location

Atlanta, GA

Print_ISBN

0-7803-7177-1

Type

conf

DOI

10.1109/ULTSYM.2001.991639

Filename

991639