DocumentCode

3786366

Title

2003 Best Paper Award

Author

D.S. Boning

Volume

17

Issue

3

fYear

2004

Firstpage

245

Lastpage

246

Keywords

Awards

Journal_Title

IEEE Transactions on Semiconductor Manufacturing

Publisher

ieee

ISSN

0894-6507

Type

jour

DOI

10.1109/TSM.2004.831941

Filename

1321116