3786367

Guest Editorial Special Section on the International Symposium on Semiconductor Manufacturing

B. Sohn

17

3

2004

247

247

"Semiconductor device manufacture","Production facilities","Electronics industry","Lithography","Moore´s Law","Dielectrics","MOSFETs","Paper technology","Materials science and technology","Rhythm"

IEEE Transactions on Semiconductor Manufacturing

ieee

0894-6507

jour

10.1109/TSM.2004.832970

1321117