An acoustic vortex generator for microfluidic particle entrapment

Author

Sathaye, Abhijit ; Lal, Amit

Author_Institution

Dept. of Electr. & Comput. Eng., Wisconsin Univ., Madison, WI, USA

Volume

1

fYear

2001

fDate

2001

Firstpage

641

Abstract

In this paper, we report on a flexural plate wave device (FPW) for particle entrapment inside a microfluidic channel. Surface micromachined polysilicon actuators placed inside the channel are driven at their flexural plate wave resonances by applying suitable drive-voltage to an external bulk piezoelectric PZT (Lead-Zirconate-Titanate Oxide) plate. The resonating polysilicon surface micromachines generate shear viscous acoustic field in the surrounding fluid. The field results in fluid vortices that can trap particles in the fluid flow. The acoustic vortex generator can be used for bead concentration in micro-fluidic assay

Keywords

elemental semiconductors; lead compounds; microactuators; microfluidics; micromachining; piezoelectric actuators; piezoelectric transducers; silicon; Si-PZT; Si-PbZrO3TiO3; acoustic vortex generator; bead concentration; drive-voltage; external bulk piezoelectric PZT plate; flexural plate wave device; flexural plate wave resonances; micro-fluidic assay; microfluidic channel; microfluidic particle entrapment; shear viscous acoustic field; surface micromachined polysilicon actuators; Acoustic devices; Acoustic waves; Actuators; Fluid flow; Frequency; Microfluidics; Nonlinear acoustics; Optical surface waves; Resonance; Surface acoustic wave devices;

fLanguage

English

Publisher

ieee

Conference_Titel

Ultrasonics Symposium, 2001 IEEE

Conference_Location

Atlanta, GA

Print_ISBN

0-7803-7177-1

Type

conf

DOI

10.1109/ULTSYM.2001.991810

Filename

991810