DocumentCode :
3786862
Title :
Guest Editorial Special Section on Microelectronics Manufacturing: Prosperity and Environmental Stewardship
Author :
S.P. Beaudoin;R.M. Content;L. Losey;F. Shadman
Volume :
17
Issue :
4
fYear :
2004
Firstpage :
481
Lastpage :
482
Keywords :
"Microelectronics","Semiconductor device manufacture","Chemical engineering","Manufacturing industries","USA Councils","Chemical technology","Adhesives","Manufacturing processes","Cleaning","Environmental management"
Journal_Title :
IEEE Transactions on Semiconductor Manufacturing
Publisher :
ieee
ISSN :
0894-6507
Type :
jour
DOI :
10.1109/TSM.2004.837000
Filename :
1353299
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=3786862
