3786863

Guest Editorial Special Section on the Advanced Semiconductor Manufacturing Conference

C. Hess;L.H. Weiland

17

4

2004

562

563

"Semiconductor device manufacture","Manufacturing processes","Circuit testing","Semiconductor materials","Manufacturing automation","Microelectronics","Integrated circuit yield","Components, Packaging, and Manufacturing Technology Society","Electron Devices Society","Metrology"

IEEE Transactions on Semiconductor Manufacturing

ieee

0894-6507

jour

10.1109/TSM.2004.835730

1353311