DocumentCode :
3787086
Title :
RF MEMS theory, design, and technology [Book Review]
Author :
J.J. Shea
Volume :
20
Issue :
6
fYear :
2004
Firstpage :
65
Lastpage :
65
Keywords :
"Book reviews","Radiofrequency microelectromechanical systems","Switches","Varactors","Inductors","Fabrication","Microwave technology","Semiconductor films","Noise shaping","Semiconductor device noise"
Journal_Title :
IEEE Electrical Insulation Magazine
Publisher :
ieee
ISSN :
0883-7554
Type :
jour
DOI :
10.1109/MEI.2004.1367526
Filename :
1367526
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=3787086
