• DocumentCode
    3787490
  • Title

    Guest Editorial Special Section on Materials-Related Manufacturing Issues in the Nanochip Era

  • Author

    R. Singh;S. Tyagi;A. Shimazaki;C.L. Claeys;S.-H. Chen;R.P.S. Thakur

  • Volume
    18
  • Issue
    1
  • fYear
    2005
  • Firstpage
    1
  • Lastpage
    4
  • Keywords
    "Manufacturing","Dielectric materials","Semiconductor device manufacture","Silicon","High K dielectric materials","Optical materials","Physics","USA Councils","Costs","Materials science and technology"
  • Journal_Title
    IEEE Transactions on Semiconductor Manufacturing
  • Publisher
    ieee
  • ISSN
    0894-6507
  • Type

    jour

  • DOI
    10.1109/TSM.2004.841835
  • Filename
    1393037
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3787490