• DocumentCode
    3788165
  • Title

    A User´s Guide to Vacuum Technology [Book Review]

  • Author

    Yan Feng

  • Volume
    21
  • Issue
    3
  • fYear
    2005
  • Firstpage
    54
  • Lastpage
    54
  • Keywords
    "Book reviews","Vacuum technology","Vacuum systems","Fluid flow","Fluid flow measurement","Velocity measurement","Pressure measurement","Microelectronics","Optical films","Optical pumping"
  • Journal_Title
    IEEE Circuits and Devices Magazine
  • Publisher
    ieee
  • ISSN
    8755-3996
  • Type

    jour

  • DOI
    10.1109/MCD.2005.1438817
  • Filename
    1438817