DocumentCode
3788165
Title
A User´s Guide to Vacuum Technology [Book Review]
Author
Yan Feng
Volume
21
Issue
3
fYear
2005
Firstpage
54
Lastpage
54
Keywords
"Book reviews","Vacuum technology","Vacuum systems","Fluid flow","Fluid flow measurement","Velocity measurement","Pressure measurement","Microelectronics","Optical films","Optical pumping"
Journal_Title
IEEE Circuits and Devices Magazine
Publisher
ieee
ISSN
8755-3996
Type
jour
DOI
10.1109/MCD.2005.1438817
Filename
1438817
Link To Document