• DocumentCode
    3790046
  • Title

    Comments on "An approximate solution for the redistribution of impurities during second oxidation"

  • Author

    G. Masetti

  • Author_Institution
    C.N.R.-Lamel Laboratory, Via Castagnoli, Bologna, Italy
  • Volume
    23
  • Issue
    9
  • fYear
    1976
  • Firstpage
    1106
  • Lastpage
    1107
  • Journal_Title
    IEEE Transactions on Electron Devices
  • Publisher
    ieee
  • ISSN
    0018-9383
  • Type

    jour

  • DOI
    10.1109/T-ED.1976.18547
  • Filename
    1478560