DocumentCode
3790046
Title
Comments on "An approximate solution for the redistribution of impurities during second oxidation"
Author
G. Masetti
Author_Institution
C.N.R.-Lamel Laboratory, Via Castagnoli, Bologna, Italy
Volume
23
Issue
9
fYear
1976
Firstpage
1106
Lastpage
1107
Journal_Title
IEEE Transactions on Electron Devices
Publisher
ieee
ISSN
0018-9383
Type
jour
DOI
10.1109/T-ED.1976.18547
Filename
1478560
Link To Document