DocumentCode
3790671
Title
ULSI Semiconductor Technology Atlas [Book Review]
Author
G. Palumbo
Volume
21
Issue
5
fYear
2005
Firstpage
25
Lastpage
25
Keywords
"Book reviews","Ultra large scale integration","Integrated circuit technology","Random access memory","Circuit noise","Integrated circuit manufacture","Microelectronics","Dielectric substrates","Capacitors","Magnetic separation"
Journal_Title
IEEE Circuits and Devices Magazine
Publisher
ieee
ISSN
8755-3996
Type
jour
DOI
10.1109/MCD.2005.1517389
Filename
1517389
Link To Document