DocumentCode :
3790782
Title :
Special Section on the International Symposium on Semiconductor Manufacturing
Author :
N. Otsuka;M. Tomoyasu
Volume :
18
Issue :
4
fYear :
2005
Firstpage :
475
Lastpage :
476
Keywords :
"Special issues and sections","Semiconductor device manufacture","Electronics industry","Control systems","Size control","Process control","Etching","Pulp manufacturing","Design optimization","Contamination"
Journal_Title :
IEEE Transactions on Semiconductor Manufacturing
Publisher :
ieee
ISSN :
0894-6507
Type :
jour
DOI :
10.1109/TSM.2005.858462
Filename :
1528557
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=3790782
