• DocumentCode
    3790782
  • Title

    Special Section on the International Symposium on Semiconductor Manufacturing

  • Author

    N. Otsuka;M. Tomoyasu

  • Volume
    18
  • Issue
    4
  • fYear
    2005
  • Firstpage
    475
  • Lastpage
    476
  • Keywords
    "Special issues and sections","Semiconductor device manufacture","Electronics industry","Control systems","Size control","Process control","Etching","Pulp manufacturing","Design optimization","Contamination"
  • Journal_Title
    IEEE Transactions on Semiconductor Manufacturing
  • Publisher
    ieee
  • ISSN
    0894-6507
  • Type

    jour

  • DOI
    10.1109/TSM.2005.858462
  • Filename
    1528557
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3790782